Browsing University of Galway Theses (PhD Theses) by Subject "DUV photolithography"
Now showing items 1-1 of 1
-
Numerical Modelling and Measurement of Spatial Coherence in a Lithographic System
(2011-09-30)For the last five decades, optical lithography has been used universally for the manufacture of integrated circuits. The drive towards smaller circuit feature size, and the resulting increase in resolution of lithography ...